AlN, ScN, and Al-Sc-N ternary alloys : structural, optical, and electrical properties
Authors
Deng, Ruopeng
ORCID
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Other Contributors
Gall, Daniel
Chrisey, Douglas B.
Lewis, Kim M.
Chen, Ying
Chrisey, Douglas B.
Lewis, Kim M.
Chen, Ying
Issue Date
2013-12
Keywords
Materials engineering
Degree
PhD
Terms of Use
This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
Full Citation
Abstract
For the purpose of achieving tilted c-axis texture in AlN, off-axis deposition is temperature. XRD pole figure analysis show that layers deposited from a normal angle (α = 0°) exhibit fiber texture, with the c-axis tilted by 42±2° off the substrate normal. However, as α is increased to 45°, two preferred in-plane grain orientations emerge, with populations I and II having the c-axis tilted towards and away from the deposition flux, by 53±2° and 47±1° off the substrate normal, respectively. Increasing α further to 65 and 84°, results in the development of a single population II with a 43±1° tilt. The observed tilt is ideal for shear mode electromechanical coupling, which is maximized at 48°. And this developing bi-axial texture is attributed to evolutionary competitive growth mode which selects out-of-plane and in-plane orientation by nuclei growth rates.
Description
December 2013
School of Engineering
School of Engineering
Department
Dept. of Materials Science and Engineering
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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