Theoretical and experimental investigation of squeeze film damping in microsystems
Authors
Huang, Shujuan
ORCID
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Other Contributors
Borca-Tasçiuc, Diana-Andra
Tichy, John A.
Blanchet, Thierry A.
Wen, John T.
Hella, Mona Mostafa
Tichy, John A.
Blanchet, Thierry A.
Wen, John T.
Hella, Mona Mostafa
Issue Date
2014-05
Keywords
Mechanical engineering
Degree
PhD
Terms of Use
This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
Full Citation
Abstract
Besides theoretical investigation, experimental efforts were carried out to validate the theoretical models. Two different techniques were employed to study the squeeze film damping effect in microscale system. In the first method, experimental setup consisted of vibrating devices with micro plate anchored by cantilevers to a vibrating frame. The test specimens were fabricated via a single mask process by microfabrication techniques. The frequency response of the plate in air and five liquids was investigated and the results were compared with theoretical prediction. In the second method, an improved technique was employed from which the damping coefficient was determined directly. The setup consisted a vibrating container which was filled with liquid and a plate that was attached to a force sensor and immersed in the fluid. The damping coefficient was determined directly by measuring the force exerted on the plate and the velocity of the substrate. It was found that the experimental result agreed well with the theoretical predictions provided by the tilt model if a constant correction was added to the original gap between the damping surfaces.
Description
May 2014
School of Engineering
School of Engineering
Department
Dept. of Mechanical, Aerospace, and Nuclear Engineering
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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