A new route to nanoscale tomographic chemical analysis : focused ion beam-induced auger electron spectroscopy
Authors
Parvaneh, Hamed
ORCID
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Other Contributors
Hull, Robert, 1959-
Lewis, Daniel J.
Gall, Daniel
Moore, Richard
Wang, G.-C. (Gwo-Ching), 1946-
Lewis, Daniel J.
Gall, Daniel
Moore, Richard
Wang, G.-C. (Gwo-Ching), 1946-
Issue Date
2014-12
Keywords
Materials science and engineering
Degree
PhD
Terms of Use
This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
Full Citation
Abstract
In IAES, however, large excitation cross sections can occur by promotion of in-ner shell electrons through crossing of molecular orbitals. Originally such phenomenological excitation processes were first proposed [3] for bi-particle gas phase collision systems to explain the generation of inner shell vacancies in violent collisions. In addition to excitation of incident or target atoms, due to a much heavier mass of ions compared to electrons, there would also be a substantial momentum transfer from the incident to the target atoms. This may cause the excited target atom to recoil from the lattice site or alternatively sputter off the surface with the possibility of de-excitation while the atom is either in motion in the matrix or traveling in vacuum. As a result, one could expect differences between the spectra induced by incident electrons and ions and interpretation of the IAE spectra requires separate consideration of both excitation and decay processes.
Description
December 2014
School of Engineering
School of Engineering
Department
Dept. of Materials Science and Engineering
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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