Application of surface acoustic waves to nondestructive evaluation of semiconductor surfaces
Authors
Gilboa, Haim
ORCID
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Other Contributors
Das, P.
Borrego, Jose M.
Ghandhi, Sorab Khushro, 1928-
MacCrone, R. K.
Borrego, Jose M.
Ghandhi, Sorab Khushro, 1928-
MacCrone, R. K.
Issue Date
1977-08
Keywords
Electrical Engineering
Degree
PhD
Terms of Use
This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
Full Citation
Abstract
This work presents a study of the electrical properties of semiconductors using the interaction between surface acoustic waves and a semiconductor in the separated medium configuration (the SAW convolver). This study has been conducted towards developing a new technique for nondestructive evaluation of semiconductor surfaces using surface acoustic waves. The semiconductor is placed a small distance above the delay line, with a uniform airgap between the two media. Although there is no mechanical contact between the two media, the electric fields associated with the surface acoustic waves penetrate into the semiconductor and interact with the free carriers. As a result of this nonlinear interaction, the SAW is attenuated, there is a change in the SAW velocity, and dc acousto-electric voltages are developed across the semiconductor. In the case of two oppositely propagating surface waves, voltage proportional to the convolution of the two input voltages is also generated.
Description
August 1977
School of Engineering
School of Engineering
Department
Dept. of Electrical and Systems Engineering
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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