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    Thermal and electrical stability of metal/porous low-k dielectric interfaces

    Author
    He, Ming
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    30377_Ming_He_PhD_Thesis_2011.pdf (3.947Mb)
    30378_Ming He thesis frontpage_PhD.pdf (11.64Kb)
    Other Contributors
    Lu, T.-M. (Toh-Ming), 1943-; Bakhru, Hassaram; Bhat, Ishwara B.; Lewis, Kim M.; Nayak, Saroj K.;
    Date Issued
    2011-08
    Subject
    Physics
    Degree
    PhD;
    Terms of Use
    This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.;
    Metadata
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    URI
    https://hdl.handle.net/20.500.13015/3334
    Abstract
    Description
    August 2011; School of Science; Center for Integrated Electronics
    Department
    Dept. of Physics, Applied Physics, and Astronomy;
    Publisher
    Rensselaer Polytechnic Institute, Troy, NY
    Relationships
    Rensselaer Theses and Dissertations Online Collection;
    Access
    Restricted to current Rensselaer faculty, staff and students. Access inquiries may be directed to the Rensselaer Libraries.;
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    • RPI Theses Online (Complete)

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