Thermal and electrical stability of metal/porous low-k dielectric interfaces

Authors
He, Ming
ORCID
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Other Contributors
Lu, T.-M. (Toh-Ming), 1943-
Bakhru, Hassaram
Bhat, Ishwara B.
Lewis, Kim M.
Nayak, Saroj K.
Issue Date
2011-08
Keywords
Physics
Degree
PhD
Terms of Use
This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
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Abstract
Description
August 2011
School of Science
Center for Integrated Electronics
Department
Dept. of Physics, Applied Physics, and Astronomy
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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