Synthesis, structure, and film properties of novel low-k UV-activepolycarbosilanes with embedded disilacyclobutanes

Authors
LeFevre, Scott W.
ORCID
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32502_LeFevre PhD Dissertation.pdf (6.17 MB)
32503_Title and Abstract.pdf (72.68 KB)
Other Contributors
Ryu, Chang Yeol
Interrante, Leonard V., 1939-
Dinolfo, Peter
Ozisik, Rahmi
McGown, Linda Baine
Issue Date
2011-12
Keywords
Chemistry
Degree
PhD
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This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
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URI
https://hdl.handle.net/20.500.13015/3422
Abstract
Description
December 2011
School of Science
Department
Dept. of Chemistry and Chemical Biology
Publisher
Rensselaer Polytechnic Institute, Troy, NY
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Rensselaer Theses and Dissertations Online Collection
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