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    CVD Parylene-N as pore sealant for porous low-κ dielectrics

    Author
    Juneja, Jasbir S.
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    Other Contributors
    Lu, T.-M. (Toh-Ming), 1943-; Bakhru, Hassaram; Plawsky, Joel L., 1957-; Kane, Ravi S.; Bhat, Ishwara B.;
    Date Issued
    2006-12
    Subject
    Chemical and biological engineering
    Degree
    PhD;
    Terms of Use
    This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.;
    Metadata
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    URI
    https://hdl.handle.net/20.500.13015/3736
    Abstract
    Description
    December 2006; School of Engineering
    Department
    Dept. of Chemical and Biological Engineering;
    Publisher
    Rensselaer Polytechnic Institute, Troy, NY
    Relationships
    Rensselaer Theses and Dissertations Online Collection;
    Access
    Restricted to current Rensselaer faculty, staff and students. Access inquiries may be directed to the Rensselaer Research Libraries.;
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    • RPI Theses Online (Complete)

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