CVD Parylene-N as pore sealant for porous low-κ dielectrics

Authors
Juneja, Jasbir S.
ORCID
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Other Contributors
Lu, T.-M. (Toh-Ming), 1943-
Bakhru, Hassaram
Plawsky, Joel L., 1957-
Kane, Ravi S.
Bhat, Ishwara B.
Issue Date
2006-12
Keywords
Chemical and biological engineering
Degree
PhD
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This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
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Abstract
Description
December 2006
School of Engineering
Department
Dept. of Chemical and Biological Engineering
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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