Geometric factors affecting growth rate in oblique angle deposition

Authors
Vyas, Garima
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Other Contributors
Schubert, E. Fred
Kim, Jong Kyu
Siegel, R. W. (Richard W.)
Issue Date
2007-12
Keywords
Electrical engineering
Degree
MS
Terms of Use
This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
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Abstract
Description
December 2007
School of Engineering
Department
Dept. of Electrical, Computer, and Systems Engineering
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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