dc.rights.license | Restricted to current Rensselaer faculty, staff and students. Access inquiries may be directed to the Rensselaer Research Libraries. | |
dc.contributor | Plawsky, Joel L., 1957- | |
dc.contributor | Gill, William N. | |
dc.contributor | Martin, Lealon L. | |
dc.contributor | Gall, Daniel | |
dc.contributor | Borca-Tasçiuc, Theodorian | |
dc.contributor.author | Achanta, Ravi S. | |
dc.date.accessioned | 2021-11-03T10:53:10Z | |
dc.date.available | 2021-11-03T10:53:10Z | |
dc.date.created | 2008-01-18T11:10:53Z | |
dc.date.issued | 2008-05 | |
dc.identifier.uri | https://hdl.handle.net/20.500.13015/4044 | |
dc.description | May 2008 | |
dc.description | School of Engineering | |
dc.language.iso | ENG | |
dc.publisher | Rensselaer Polytechnic Institute, Troy, NY | |
dc.relation.ispartof | Rensselaer Theses and Dissertations Online Collection | |
dc.subject | Chemical and biological engineering | |
dc.title | Physical-chemical interactions at metal/low-k dielectric interfaces | |
dc.type | Electronic thesis | |
dc.type | Thesis | |
dc.digitool.pid | 9664 | |
dc.digitool.pid | 9665 | |
dc.digitool.pid | 9667 | |
dc.digitool.pid | 9666 | |
dc.digitool.pid | 9668 | |
dc.rights.holder | This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author. | |
dc.description.degree | PhD | |
dc.relation.department | Dept. of Chemical and Biological Engineering | |