Study of parylene thin films

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175291_thesis.pdf (2.93 MB)
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Authors
You, Lu
Issue Date
1993-12
Type
Electronic thesis
Thesis
Language
ENG
Keywords
Physics
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Abstract
Description
December 1993
School of Science
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Publisher
Rensselaer Polytechnic Institute, Troy, NY
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URI
https://hdl.handle.net/20.500.13015/1409
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RPI Theses Online (Complete)