Temperature measurement by thermal diffuse scattering in electron backscatter diffraction
Loading...
Authors
Wu, Xiaowei
Issue Date
2013-05
Type
Electronic thesis
Thesis
Thesis
Language
ENG
Keywords
Materials science and engineering
Alternative Title
Abstract
Temperature measurement is important to studies of heat generation and transfer processes in a wide range of engineering systems. However, the feature sizes of many engineering systems, such as microelectronic, optoelectronic, and micromechanical systems, have been reduced down to length scales as small as tens of nanometers and continue to decrease. Experimental studies of the nano-scale thermal processes involved in such systems are not possible without high spatial resolution temperature measurement techniques.
Description
May 2013
School of Engineering
School of Engineering
Full Citation
Publisher
Rensselaer Polytechnic Institute, Troy, NY