Epitaxial deposition of low-defect AlN and AlGaN films

Authors
Jain, Rakesh
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Other Contributors
Shur, Michael
Wetzel, Christian
Picu, Catalin R.
Dutta, Partha S.
Hella, Mona Mostafa
Issue Date
2012-12
Keywords
Engineering science
Degree
PhD
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This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
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Abstract
Description
December 2012
School of Engineering
Department
Engineering Science program
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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