Epitaxial deposition of low-defect AlN and AlGaN films

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Authors
Jain, Rakesh
Issue Date
2012-12
Type
Electronic thesis
Thesis
Language
ENG
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Engineering science
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Abstract
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December 2012
School of Engineering
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Rensselaer Polytechnic Institute, Troy, NY
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https://hdl.handle.net/20.500.13015/3677
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RPI Theses Online (Complete)