CVD Parylene-N as pore sealant for porous low-κ dielectrics

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Authors
Juneja, Jasbir S.
Issue Date
2006-12
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Electronic thesis
Thesis
Language
ENG
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Chemical and biological engineering
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December 2006
School of Engineering
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Rensselaer Polytechnic Institute, Troy, NY
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https://hdl.handle.net/20.500.13015/3736
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RPI Theses Online (Complete)