Biaxial texture evolution of nanostructured films under dynamic shadowing effect and applications

Abstract

Texture formation and evolution in polycrystalline films are quite complicated, and they still remain as challenging subjects. Oblique angle deposition is an effective way to control the texture due to the shadowing effect introduced by oblique incident flux. A new dynamic oblique angle sputter deposition technique, called flipping rotation, was developed. In this rotation mode, the substrate is arranged to rotate continuously at a fixed speed around an axis lying within and parallel to the substrate. The incident flux is always perpendicular to the rotational axis and the flux incident angle relative to the substrate normal changes continuously.