Biaxial texture evolution of nanostructured films under dynamic shadowing effect and applications
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Authors
Chen, Liang
Issue Date
2014-05
Type
Electronic thesis
Thesis
Thesis
Language
ENG
Keywords
Applied physics
Alternative Title
Abstract
Texture formation and evolution in polycrystalline films are quite complicated, and they still remain as challenging subjects. Oblique angle deposition is an effective way to control the texture due to the shadowing effect introduced by oblique incident flux. A new dynamic oblique angle sputter deposition technique, called flipping rotation, was developed. In this rotation mode, the substrate is arranged to rotate continuously at a fixed speed around an axis lying within and parallel to the substrate. The incident flux is always perpendicular to the rotational axis and the flux incident angle relative to the substrate normal changes continuously.
Description
May 2014
School of Science
School of Science
Full Citation
Publisher
Rensselaer Polytechnic Institute, Troy, NY