AlN, ScN, and Al-Sc-N ternary alloys : structural, optical, and electrical properties
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Authors
Deng, Ruopeng
Issue Date
2013-12
Type
Electronic thesis
Thesis
Thesis
Language
ENG
Keywords
Materials engineering
Alternative Title
Abstract
For the purpose of achieving tilted c-axis texture in AlN, off-axis deposition is temperature. XRD pole figure analysis show that layers deposited from a normal angle (α = 0°) exhibit fiber texture, with the c-axis tilted by 42±2° off the substrate normal. However, as α is increased to 45°, two preferred in-plane grain orientations emerge, with populations I and II having the c-axis tilted towards and away from the deposition flux, by 53±2° and 47±1° off the substrate normal, respectively. Increasing α further to 65 and 84°, results in the development of a single population II with a 43±1° tilt. The observed tilt is ideal for shear mode electromechanical coupling, which is maximized at 48°. And this developing bi-axial texture is attributed to evolutionary competitive growth mode which selects out-of-plane and in-plane orientation by nuclei growth rates.
Description
December 2013
School of Engineering
School of Engineering
Full Citation
Publisher
Rensselaer Polytechnic Institute, Troy, NY