Performance of through strata vias (TSVs) in three-dimensional integration

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19449_Zheng's MS thesis.pdf (8.27 MB)
19450_Zheng's abstitle.pdf (32.38 KB)
Authors
Xu, Zheng
Issue Date
2009-08
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Electronic thesis
Thesis
Language
ENG
Keywords
Electrical engineering
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August 2009
School of Engineering
Center for Integrated Electronics
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Rensselaer Polytechnic Institute, Troy, NY
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https://hdl.handle.net/20.500.13015/2807
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RPI Theses Online (Complete)