Thermal and electrical stability of metal/porous low-k dielectric interfaces

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Authors

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Lu, T.-M. (Toh-Ming), 1943-
Bakhru, Hassaram
Bhat, Ishwara B.
Lewis, Kim M.
Nayak, Saroj K.

Issue Date

2011-08

Type

Electronic thesis
Thesis

Language

ENG

Keywords

Physics

Degree

PhD

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Abstract

Description

August 2011
School of Science
Center for Integrated Electronics

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Publisher

Rensselaer Polytechnic Institute, Troy, NY

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URI

https://hdl.handle.net/20.500.13015/3334

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Collections

RPI Theses Online (Complete)

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