Thermal and electrical stability of metal/porous low-k dielectric interfaces

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Authors
He, Ming
Issue Date
2011-08
Type
Electronic thesis
Thesis
Language
ENG
Keywords
Physics
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Abstract
Description
August 2011
School of Science
Center for Integrated Electronics
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Publisher
Rensselaer Polytechnic Institute, Troy, NY
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URI
https://hdl.handle.net/20.500.13015/3334
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RPI Theses Online (Complete)