Recovery of crystalline and optoelectronic properties in Si(100) after focused ion beam implantation of Ga+ and annealing
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Authors
Bearup, Delia Rose
Issue Date
2009-08
Type
Electronic thesis
Thesis
Thesis
Language
ENG
Keywords
Materials science and engineering
Alternative Title
Abstract
Description
August 2009
School of Engineering
School of Engineering
Full Citation
Publisher
Rensselaer Polytechnic Institute, Troy, NY