Development of barrierless dielectrics and their integration with copper for nanodevice wiring

Authors
Singh, Binay Kumar
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Other Contributors
Ramanath, G. (Ganpati)
Interrante, Leonard V., 1939-
Plawsky, Joel L., 1957-
Siegel, R. W. (Richard W.)
Lu, T.-M. (Toh-Ming), 1943-
Issue Date
2009-05
Keywords
Chemical engineering
Degree
PhD
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This electronic version is a licensed copy owned by Rensselaer Polytechnic Institute, Troy, NY. Copyright of original work retained by author.
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Abstract
Description
May 2009
School of Engineering
Department
Dept. of Chemical and Biological Engineering
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Relationships
Rensselaer Theses and Dissertations Online Collection
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