Synthesis, structure, and film properties of novel low-k UV-activepolycarbosilanes with embedded disilacyclobutanes
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Authors
LeFevre, Scott W.
Issue Date
2011-12
Type
Electronic thesis
Thesis
Thesis
Language
ENG
Keywords
Chemistry
Alternative Title
Abstract
Description
December 2011
School of Science
School of Science
Full Citation
Publisher
Rensselaer Polytechnic Institute, Troy, NY