Synthesis, structure, and film properties of novel low-k UV-activepolycarbosilanes with embedded disilacyclobutanes

Thumbnail Image
Files
32502_LeFevre PhD Dissertation.pdf (6.17 MB)
32503_Title and Abstract.pdf (72.68 KB)
Authors
LeFevre, Scott W.
Issue Date
2011-12
Type
Electronic thesis
Thesis
Language
ENG
Keywords
Chemistry
Research Projects
Organizational Units
Journal Issue
Alternative Title
Abstract
Description
December 2011
School of Science
Full Citation
Publisher
Rensselaer Polytechnic Institute, Troy, NY
Terms of Use
Journal
Volume
Issue
URI
https://hdl.handle.net/20.500.13015/3422
PubMed ID
DOI
ISSN
EISSN
Collections
RPI Theses Online (Complete)