Ultra shallow ion implantation in GaAs and high temperature dopant activation using amorphous silicon caps
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Authors
Siddiqui, Shahab
Issue Date
2007-12
Type
Electronic thesis
Thesis
Thesis
Language
ENG
Keywords
computer , Systems engineering , Electrical
Alternative Title
Abstract
Description
December 2007
School of Engineering
School of Engineering
Full Citation
Publisher
Rensselaer Polytechnic Institute, Troy, NY